Low temperature study of loss mechanisms of mechanical oscillators
نویسندگان
چکیده
In order to understand the loss mechanism of mechanical oscillators in micro-electromechanical systems, we have studied the temperature dependence of the quality factor Q of a high Q silicon mechanical oscillator from 0.4 K to 300 K. At temperatures above 70 K, the energy loss is principally caused by thermoelastic effect in the flexural components of the modes. Below 50 K, we find the improvements in vibration isolation guided by the finite element method do not significantly improve its Q. This indicates that some intrinsic loss mechanism may still be important even at low temperatures.
منابع مشابه
Fluidic Oscillators’ Applications, Structures and Mechanisms – A Review
Enhancement of heat and mass transfer and decrease of energy dissipation are great necessities of the evolution of fluid flow devices. Utilizing oscillatory or pulsatile fluid flow for periodic disturbing of velocity and thermal boundary layers is one of the methods with exciting results. Passive methods of generating oscillatory flow are preferred to active methods because of simplicity, no ne...
متن کاملSurface Degradation of Polymer Matrix Composites Under Different Low Thermal Cycling Conditions
The principal effects of mass degradation on polymer matrix composites (PMCs) are the decay of mechanical properties such as strength, elongation, and resilience. This degradation is a common problem of the PMCs under thermal cycling conditions. In this article, composite degradation was investigated by measurement of total mass loss (TML) using the Taguchi approach. Thermal cycling tests were ...
متن کاملOn the modes and loss mechanisms of a high Q mechanical oscillator
We have performed laser-Doppler vibrometry measurements of the vibration of a double-paddle oscillator. Seven modes with principally out-of-plane motion have been identified. Their resonance frequencies and mode shapes are in excellent agreement with three-dimensional finite element simulations. We have found that the second antisymmetric torsional mode has exceptionally good vibration isolatio...
متن کاملNovel ”vibrating wire like” NEMS and MEMS structures for low temperature physics
Using microfabrication techniques, it has become possible to make mechanical devices with dimensions in the micro and even in the nano scale domain. Allied to low temperature techniques, these systems have opened a new path in physics with the ultimate goal of reaching the quantum nature of a macroscopic mechanical degree of freedom1. Within this field, materials research plays a significant ro...
متن کاملThe Effect of Deformation Temperature on the Mechanical Properties and Microstructural Evolutions of High Manganese TWIP Steel
In this study, the effect of tensile test temperature (148 to 673 K) on the microstructural evolutions and the mechanical properties of high manganese twinning induced plasticity (TWIP) steel with the chemical composition of Fe- 31Mn-3Al-3Si (wt. %) was investigated. XRD, SEM and TEM were used to study the microstructural evolutions. Stacking fault energy (SFE) of the alloy was also calculated ...
متن کامل